| LEADER | 01119pam 22003374a 4500 | |
| 008 | 070525s2006 flum b a001 0 eng
|
| 016 | |
| 020 | | |a 0849391377 (alk. paper) |
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| 040 | | |a DLC |c DLC|d YDX|d BAKER|d CIN |d TH-BaPIT |
|
| 050 | | 00 |r Ref |a TK7875 |b .M533 2006 |
|
| 222 | |
| 245 | | 00 |a MEMS : |b introduction and fundamentals / |c edited by Mohamed Gad-El-Hak. |
|
| 250 | |
| 260 | | |a Boca Raton : |b CRC/Taylor & Francis, |c 2006. |
|
| 300 | | |a 1 v. (various pagings) : |b ill. ; |c 26 cm. |
|
| 440 | |
| 650 | | 0 |a Microelectromechanical systems. | | 0 |a Microelectronics. | | 0 |a Nanotechnology. |
|
| 700 | | 1 |a Gad-el-Hak, Mohamed,|d 1945- |
|
| 856 | | 41 |u http://www.engnetbase.com/books/4406/9137fm.pdf|z Connect to resource online |
|
| 930 | |
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