LEADER | 00556cam 22001934a 4500 | |
008 | 080222s2006 us m a001 0 eng d
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016 | |
020 | |
040 | |a kku-c |c kku-c |d TH-BaPIT |
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050 | 4 |a TK7875 |b .L783f 2006 |
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100 | |
245 | 10 |a Foundations of MEMS / |c Chang Liu. |
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246 | |
260 | |a Upper Saddle River, N.J. : |b Pearson/Prentice Hall, |c c2006. |
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300 | |a xxii, 530 p. : |b ill. ; |c 25 cm. |
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650 | 0 |a Microelectromechanical systems. |
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930 | |a งปม. |d 19/02/51 |h 3,595 baht |
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